阳极溅射原子流对真空电弧电流的影响

J. Londer, K. Ulyanov
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引用次数: 0

摘要

本文研究了低电流密度(≤100 A/cm2)真空放电中阳极溅射原子对快速阴极离子流的影响。用瞬时电离模型和有限电离长度模型来考虑这个问题。计算将稳定电流的边界定义为电弧电流密度、溅射原子密度和速度的B函数。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of the anode-spattered atom stream on the current flow in the vacuum arc
The paper deals with the effect of the anode-spattered atoms on the fast cathode ion stream in the vacuum discharge at relatively low (⩽100 A/cm2) current densities. The problem is considered in terms of an instantaneous ionization model and a model regarding for a finite ionization length. The calculations, define the boundary of the stable current flow as B function of the arc current density, and densities and velocities of sputtered atoms.
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CiteScore
0.40
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