一种具有近场分辨率的新型光电接收器阵列[用于超高密度存储]

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI:10.1109/LEOSST.2000.869698

B. Seshadri, J. Tang, I. Chyr, A. Steckl, F. Beyette

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引用次数: 0

摘要

提出了一种利用近场光学特性提供亚纳米空间分辨率的光接收器阵列。近场光接收器阵列由光子CMOS光接收器芯片和基于MEMS的孔径阵列组成，采用标准制造技术实现。

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A novel photoreceiver array with near field resolution capability [for ultrahigh-density storage]

A photoreceiver array is presented that exploits the features of near field optics to provide sub-nanometer spatial resolution. Comprised of a photonic CMOS photoreceiver chip and a MEMS based aperture array, the near-field photoreceiver array is implemented using standard fabrication techniques.

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2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)

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