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等离子体材料微波磁控管平均功率供电方案的研究

2010 20th International Crimean Conference "Microwave & Telecommunication Technology" Pub Date : 2010-11-11 DOI:10.1109/CRMICO.2010.5632840
S. I. Madveyko
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引用次数: 0

摘要

给出了等离子体辐射光信号在微波磁控管腔内随压力变化的实验研究结果。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Investigation of variants of power supply schemes for microwave magnetron average power for plasma processing of materials
The results of experimental research of plasma radiation optical signal depending on the pressure in the plasmatron chamber, using the different electrical networks of microwave magnetron power supply, are presented.
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来源期刊
2010 20th International Crimean Conference "Microwave & Telecommunication Technology"
2010 20th International Crimean Conference "Microwave & Telecommunication Technology"
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