自旋转矩二极管效应在mgo基磁隧道结自旋转移开关分析中的应用

H. Kubota, A. Fukushima, Y. Ootani, S. Yuasa, K. Ando, H. Maehara, K. Tsunekawa, D. Djayaprawira, N. Watanabe, Y. Suzuki
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引用次数: 0

摘要

利用UHV溅射系统(ANELVA C7100)在热氧化Si衬底上制备了多层缓冲层/Pt-Mn/Co-Fe/Ru/Co60Fe20B20 (3.2 nm)/Mg (0.4 nm)/MgO (0.6 nm)/ Co61Fe7Ni15B15 (3 nm)/Ta/Ru。自由层Co-Fe-Ni-B具有低磁致伸缩,这是MRAM具有高写/擦除周期耐久性的重要特性。在330℃下退火后,薄膜被图像化成80 nm × 170 nm的椭球体。观察到的r - h曲线在低电阻和高电阻状态之间有明显的切换。磁共振比约为80%,电阻面积积约为2 Omegam2。利用MTJ的STS效应来评价自旋转移开关。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Application of spin-torque diode effect to the analysis of spin-transfer switching in MgO-based magnetic tunnel junctions
Multilayers of buffer/Pt-Mn/Co-Fe/Ru/Co60Fe20B20 (3.2 nm)/Mg (0.4 nm)/MgO (0.6 nm)/ Co61Fe7Ni15B15 (3 nm)/Ta/Ru is prepared on thermally oxidized Si substrates by UHV sputtering system (ANELVA C7100). The free layer Co-Fe-Ni-B has low magnetostriction, which is important characteristics for MRAM with high endurance for write/erase cycles. After annealing at 330degC, the film was patterned into 80 nm x 170 nm ellipsoids. The observed R-Hcurves showed sharp switching between low and high resistance states. The MR ratio was about 80% and resistance-area product was about 2 Omegam2. STS effect for MTJ is applied to evaluate the spin-transfer switching.
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