{"title":"替代工业条件下Cvd清洗工艺中C2f6和Nf3的环保型氟混合物","authors":"M. Pittroff","doi":"10.47363/jeesr/2022(4)174","DOIUrl":null,"url":null,"abstract":"During the climate conference in Paris a binding and universal climate target was established. It was agreed to limit the temperature increase to a maximum of 2 C° until 2100 [1]. The most relevant climate gas is CO2, considered as a primary greenhouse gas with a significant impact on global warming.","PeriodicalId":417186,"journal":{"name":"Journal of Earth and Environmental Sciences Research","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Environmental-Friendly Fluorine Mixture for Cvd Cleaning Processes to Replace C2f6 and Nf3 under Industrial Conditions\",\"authors\":\"M. Pittroff\",\"doi\":\"10.47363/jeesr/2022(4)174\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"During the climate conference in Paris a binding and universal climate target was established. It was agreed to limit the temperature increase to a maximum of 2 C° until 2100 [1]. The most relevant climate gas is CO2, considered as a primary greenhouse gas with a significant impact on global warming.\",\"PeriodicalId\":417186,\"journal\":{\"name\":\"Journal of Earth and Environmental Sciences Research\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-06-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Earth and Environmental Sciences Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.47363/jeesr/2022(4)174\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Earth and Environmental Sciences Research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.47363/jeesr/2022(4)174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Environmental-Friendly Fluorine Mixture for Cvd Cleaning Processes to Replace C2f6 and Nf3 under Industrial Conditions
During the climate conference in Paris a binding and universal climate target was established. It was agreed to limit the temperature increase to a maximum of 2 C° until 2100 [1]. The most relevant climate gas is CO2, considered as a primary greenhouse gas with a significant impact on global warming.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
