热微传感器瞬态过程的分析建模

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Pub Date : 2011-04-18 DOI:10.1109/ESIME.2011.5765841

A. Kozlov, D. Randjelović, Z. Djuric

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引用次数: 3

摘要

提出了一种确定热微传感器在不同输入作用下频率响应的解析方法。该方法有以下算法。在微传感器中，划分了建模的领域。该区域被划分为具有均匀参数的区域。得到了各区域的非稳态热传导方程，并用时间傅里叶变换求解。区域间的热通量密度由频域的伴随边界条件确定。然后，得到了微传感器频率响应的解析表达式。将该模型应用于混凝土膜热微传感器，确定了阶跃脉冲输入信号的频率响应模量和参数以及输出电压的时间依赖性。

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Analytical modelling of transient processes in thermal microsensors

An analytical method is developed to determine the frequency response of thermal microsensors on various input actions. The method has the following algorithm. In a microsensor, the domain of modelling is marked out. This domain is divided into the regions with homogeneous parameters. For each region the non-steady-state heat conduction equation is obtained that is solved by means of the time Fourier transform. The heat flux densities between the regions are determined using adjoint boundary conditions in the frequency domain. After that, the analytical expression for the frequency response of the microsensor is obtained. The model is applied to the concrete membrane thermal microsensors, for which the modulus and argument of the frequency response and the time dependency of the output voltage for the step pulse input signal are determined.

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来源期刊

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

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