环形栅极MOS晶体管的建模

V. Bezhenova, A. Michalowska-Forsyth
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引用次数: 3

摘要

封闭布局是抑制NMOS晶体管辐射泄漏电流的有效方法。这种装置的非常规形状使建模成为一项具有挑战性的任务。等效宽高比估计的评估由于附加应力效应(如STI应力)而变得复杂。我们将STI应力效应引入到封闭布局晶体管的仿真中,以评估两种等效宽高比评估模型的准确性:众所周知的中线近似和最近引入的等腰梯形近似。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modeling of Annular Gate MOS Transistors
Enclosed layout is an effective way to mitigate radiation induced leakage current in NMOS transistors. The unconventional shape of such device makes modeling a challenging task. Evaluation of equivalent aspect ratio estimation is complicated by additional stress effects, such as STI stress. We incorporate the STI stress effect into simulation for enclosed layout transistor in order to evaluate accuracy of two equivalent aspect ratio evaluation models: the well-known mid-line approximation and the recently introduced isosceles trapezoid approximation.
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