{"title":"磁致伸缩驱动纳米级的先进控制","authors":"Xinkai Chen","doi":"10.1109/ICMA.2013.6618010","DOIUrl":null,"url":null,"abstract":"The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.","PeriodicalId":335884,"journal":{"name":"2013 IEEE International Conference on Mechatronics and Automation","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Advanced control for magnetostrictive actuated nano-stage\",\"authors\":\"Xinkai Chen\",\"doi\":\"10.1109/ICMA.2013.6618010\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.\",\"PeriodicalId\":335884,\"journal\":{\"name\":\"2013 IEEE International Conference on Mechatronics and Automation\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-10-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE International Conference on Mechatronics and Automation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMA.2013.6618010\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Conference on Mechatronics and Automation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMA.2013.6618010","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Advanced control for magnetostrictive actuated nano-stage
The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.
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