银纳米团簇的SILD合成:表征及应用

10th IEEE International Conference on Nanotechnology Pub Date : 2010-08-01 DOI:10.1109/NANO.2010.5697909

G. Korotcenkov, B. Cho, V. Scryshevsky, V. Tolstoy, L. Gulina

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引用次数: 1

摘要

本文介绍了银纳米团簇的合成、表征及其在硅微孔化和sno2基气体传感器优化中的应用。结果表明，沉积在单晶硅表面的银纳米粒子的浓度和尺寸可以通过硅沉积条件来控制。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Ag nanoclusters synthesized by SILD method: Characterization and applications

Results related to synthesis, characterization and applications of Ag nanoclusters for Si porosification and SnO2-based gas sensors optimization are presented in given report. It is shown that concentration and size of the silver nanoparticles deposited on a surface of monocrystalline silicon can be controlled by SILD conditions.

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10th IEEE International Conference on Nanotechnology

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