{"title":"电容式MEMS中先进的介电充电特性","authors":"M. Koutsoureli, L. Michalas, G. Papaioannou","doi":"10.1109/ICIT.2012.6209995","DOIUrl":null,"url":null,"abstract":"The present work aims to provide a comprehensive view on the available assessment tools to monitor the dielectric charging in MEMS capacitive actuators. A detailed comparison of the up to now employed methods is presented pointing out the strength and weakness of each one. The goal is to obtain a better understanding of the exploitable information drawn from experimental results in an attempt to extract appropriate information on its contribution towards the increase of knowledge on the dielectric charging. Emphasis is given on the comparison of results regarding the effect of electric field intensity, temperature, time window of observation and ambient.","PeriodicalId":365141,"journal":{"name":"2012 IEEE International Conference on Industrial Technology","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Advanced dielectric charging characterization in capacitive MEMS\",\"authors\":\"M. Koutsoureli, L. Michalas, G. Papaioannou\",\"doi\":\"10.1109/ICIT.2012.6209995\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The present work aims to provide a comprehensive view on the available assessment tools to monitor the dielectric charging in MEMS capacitive actuators. A detailed comparison of the up to now employed methods is presented pointing out the strength and weakness of each one. The goal is to obtain a better understanding of the exploitable information drawn from experimental results in an attempt to extract appropriate information on its contribution towards the increase of knowledge on the dielectric charging. Emphasis is given on the comparison of results regarding the effect of electric field intensity, temperature, time window of observation and ambient.\",\"PeriodicalId\":365141,\"journal\":{\"name\":\"2012 IEEE International Conference on Industrial Technology\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-03-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE International Conference on Industrial Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIT.2012.6209995\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE International Conference on Industrial Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIT.2012.6209995","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Advanced dielectric charging characterization in capacitive MEMS
The present work aims to provide a comprehensive view on the available assessment tools to monitor the dielectric charging in MEMS capacitive actuators. A detailed comparison of the up to now employed methods is presented pointing out the strength and weakness of each one. The goal is to obtain a better understanding of the exploitable information drawn from experimental results in an attempt to extract appropriate information on its contribution towards the increase of knowledge on the dielectric charging. Emphasis is given on the comparison of results regarding the effect of electric field intensity, temperature, time window of observation and ambient.
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