G. Frankowsky, T. Wacker, A. Hangleiter, D. Ottenwalder, F. Scholz
{"title":"选择性外延生长GaInAs量子阱中单层梯田的阶梯状生长","authors":"G. Frankowsky, T. Wacker, A. Hangleiter, D. Ottenwalder, F. Scholz","doi":"10.1109/ICIPRM.1994.328304","DOIUrl":null,"url":null,"abstract":"Using spatially and spectrally resolved low-temperature cathodoluminescence, we have investigated GaInAs/InP quantum wells grown by selective epitaxy. For quantum wells with a nominal thickness of 0.6 nm we observe a splitting of the luminescence into several lines due to the presence of fluctuations in the quantum well thickness. On 1.75/spl times/1.75 mm/sup 2/ sized patterns we observe large monolayer flat terraces up to a size of 90 /spl mu/m.<<ETX>>","PeriodicalId":161711,"journal":{"name":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Steplike growth of monolayer terraces in GaInAs quantum wells grown by selective epitaxy\",\"authors\":\"G. Frankowsky, T. Wacker, A. Hangleiter, D. Ottenwalder, F. Scholz\",\"doi\":\"10.1109/ICIPRM.1994.328304\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Using spatially and spectrally resolved low-temperature cathodoluminescence, we have investigated GaInAs/InP quantum wells grown by selective epitaxy. For quantum wells with a nominal thickness of 0.6 nm we observe a splitting of the luminescence into several lines due to the presence of fluctuations in the quantum well thickness. On 1.75/spl times/1.75 mm/sup 2/ sized patterns we observe large monolayer flat terraces up to a size of 90 /spl mu/m.<<ETX>>\",\"PeriodicalId\":161711,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"volume\":\"50 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIPRM.1994.328304\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1994.328304","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Steplike growth of monolayer terraces in GaInAs quantum wells grown by selective epitaxy
Using spatially and spectrally resolved low-temperature cathodoluminescence, we have investigated GaInAs/InP quantum wells grown by selective epitaxy. For quantum wells with a nominal thickness of 0.6 nm we observe a splitting of the luminescence into several lines due to the presence of fluctuations in the quantum well thickness. On 1.75/spl times/1.75 mm/sup 2/ sized patterns we observe large monolayer flat terraces up to a size of 90 /spl mu/m.<>