选择性外延生长GaInAs量子阱中单层梯田的阶梯状生长

G. Frankowsky, T. Wacker, A. Hangleiter, D. Ottenwalder, F. Scholz
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引用次数: 0

摘要

利用空间和光谱分辨低温阴极发光技术,我们研究了选择性外延生长的GaInAs/InP量子阱。对于标称厚度为0.6 nm的量子阱,由于量子阱厚度的波动,我们观察到发光分裂成几条线。在1.75/spl倍/1.75 mm/sup /大小的模式上,我们观察到大的单层平坦梯田,大小可达90 /spl亩/平方米
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Steplike growth of monolayer terraces in GaInAs quantum wells grown by selective epitaxy
Using spatially and spectrally resolved low-temperature cathodoluminescence, we have investigated GaInAs/InP quantum wells grown by selective epitaxy. For quantum wells with a nominal thickness of 0.6 nm we observe a splitting of the luminescence into several lines due to the presence of fluctuations in the quantum well thickness. On 1.75/spl times/1.75 mm/sup 2/ sized patterns we observe large monolayer flat terraces up to a size of 90 /spl mu/m.<>
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