高通量微波等离子体辅助溅射沉积线性可变滤波器和部署到可见光和近红外光谱仪

Optical Interference Coatings Conference (OIC) 2022 Pub Date : 1900-01-01 DOI:10.1364/oic.2022.thc.4

L. Fleming, D. Gibson, Shigeng Song, D. Hutson, Sam Ahmadzadeh, Sijia Cai, Daxing Han, E. Waddell, J. Saffell

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引用次数: 0

摘要

利用具有线性溅射靶和静态梯度均匀掩模的高通量鼓，演示了线性可变滤波器设计的制造。在3D打印的微型光谱仪中对光学性能进行了表征和功能测试。

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High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.

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Optical Interference Coatings Conference (OIC) 2022

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