微器件中流体阻尼效应的宏观建模

The Fourth International Conference on Advanced Semiconductor Devices and Microsystem Pub Date : 2002-12-16 DOI:10.1109/ASDAM.2002.1088536

G. Wachutka, G. Schrag, R. Sattler

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引用次数: 0

摘要

粘性流体阻尼效应对许多机电微器件的工作有重要影响。我们提出了一种方法，如何将这些影响适当地包括在基于物理的微设备和完整系统模型中，以节省精力，并准确地预测微机电系统的运行模拟。高穿孔微器件的计算结果证明了该方法的可用性和质量。

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Macromodeling of fluidic damping effects in microdevices

The operation of many mechatronical microdevices is significantly affected by viscous fluid damping effects. We present a methodology how these effects can be properly included in physically based microdevice and full system models for the effort-economizing and yet accurate predictive simulation of the operation of micro-mechatronical systems. The usability and quality of the approach is demonstrated by computational results for highly perforated microdevices.

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The Fourth International Conference on Advanced Semiconductor Devices and Microsystem

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