倒装芯片下填固化过程中的工艺应力分析

Prema Palaniappan, D. Baldwin
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引用次数: 1

摘要

电子工业目前正在评估倒装芯片技术的高性能,小型化组装应用。这主要是由于高I/O密度、小尺寸以及板上倒装芯片技术提供的优越电气性能。低成本电路板上的倒装芯片(FCOB)提供了可靠的互连,前提是使用了下填充材料。下填充克服了与板和模具之间热膨胀系数不匹配相关的热机械可靠性问题。底填材料的选择是实现预期性能和可靠性的关键。在组装过程中,下填充的处理会导致硅模内部产生较大的残余应力。在某些情况下,这些应力可能大到足以导致模具断裂。在本工作中,低成本倒装芯片板上组件在欠填土固化过程中进行了分析。在加工过程中,对模具的活动面进行原位应力测量,并测量相对面内应力。实验测量使用基于桑迪亚国家实验室的ATC04组装测试芯片的倒装芯片测试车进行。对四种不同的商业底填料进行了评价,并进行了比较。所研究的四个底填体之间观察到显著的应力变化。玻璃化转变温度(Tg)和储存模量(G’)与下填土固化过程中产生的残余应力之间存在相关性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
In Process Stress Analysis of Flip Chip Assemblies During Underfill Cure
The electronics industry is currently evaluating flip chip technology for high performance, miniaturized assembly applications. This is primarily because of the high I/O density, small form factor, and superior electrical performance provided by flip chip on board technology. Flip chip on low cost circuit boards (FCOB) furnishes a reliable interconnection provided underfill materials are used. Underfills overcome the thermomechanical reliability issues associated with the thermal expansion coefficient mismatch between the board and die. The selection of underfill material is critical to achieving the desired performance and reliability. Processing of underfills during assembly can result in large residual stresses within the silicon die. In some instances these stresses can be large enough to cause die fracture. In this work, low cost flip chip on board assemblies are analyzed during the underfill cure process. In situ stress measurements are performed over the active face of the die during processing and relative in-plane stresses are measured. Experimental measurements are made using flip chip test vehicles based on Sandia National Laboratories’ ATC04 Assembly Test Chip. Four different commercial underfill materials have been evaluated and a relative comparison is presented. Significant stress variations are observed between the four underfills studied. Correlation’s between the glass transition temperature (Tg) and storage modulus (G’) are made relative to residual stresses produced during underfill cure.
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