NEMS optical cross connect (OXC) driven by opticl force

This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.