Xueqian Li, Xiaowei Song, Y. Qu, Mei Li, Xingde Zhang
{"title":"用掠入射x射线测量多层光学薄膜厚度的分析","authors":"Xueqian Li, Xiaowei Song, Y. Qu, Mei Li, Xingde Zhang","doi":"10.1117/12.300731","DOIUrl":null,"url":null,"abstract":"The measuring conditions of the thickness of thin films with grazing incident x-ray is explained, and interferential principle and method to measure the thickness of thin films by grazing incident x-ray are discussed and analyzed in the paper. The periodic thickness of the multilayer optical thin films is measured with double-crystal diffractometer at a very small grazing incident angle, the result is satisfactory and measured values is in good agreement with designed values.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Analysis of the thickness measurement of multilayer optical thin films with grazing incident x-ray\",\"authors\":\"Xueqian Li, Xiaowei Song, Y. Qu, Mei Li, Xingde Zhang\",\"doi\":\"10.1117/12.300731\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The measuring conditions of the thickness of thin films with grazing incident x-ray is explained, and interferential principle and method to measure the thickness of thin films by grazing incident x-ray are discussed and analyzed in the paper. The periodic thickness of the multilayer optical thin films is measured with double-crystal diffractometer at a very small grazing incident angle, the result is satisfactory and measured values is in good agreement with designed values.\",\"PeriodicalId\":362287,\"journal\":{\"name\":\"Thin Film Physics and Applications\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-02-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Film Physics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.300731\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.300731","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analysis of the thickness measurement of multilayer optical thin films with grazing incident x-ray
The measuring conditions of the thickness of thin films with grazing incident x-ray is explained, and interferential principle and method to measure the thickness of thin films by grazing incident x-ray are discussed and analyzed in the paper. The periodic thickness of the multilayer optical thin films is measured with double-crystal diffractometer at a very small grazing incident angle, the result is satisfactory and measured values is in good agreement with designed values.
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