射频驱动氢离子源2mhz外置天线的建模与仿真

2013 IEEE Applied Electromagnetics Conference (AEMC) Pub Date : 2013-12-01 DOI:10.1109/AEMC.2013.7045024

Nayan Kumar Gunele, S. Bhongade, D. V. Ghodke, R. M. Vadjikar, V. Senecha, S. Joshi

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引用次数: 1

摘要

外部天线的建模与仿真是射频驱动氢等离子体源研究的重要内容。外部天线将外部包裹在等离子体室周围。射频脉冲功率以2兆赫频率馈送到天线，用于等离子体产生(电离)并通过电感耦合加热。利用TOSCA模块，在Opera-3D仿真平台上对该天线进行了建模和仿真。该仿真有助于研究天线的磁场特性和确定天线的电学参数。本文以400安培的天线电流为例进行了分析，并给出了分析结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Modeling and simulation of 2 MHz external antenna for RF driven H− ion source

The modeling and simulation of external antenna is important for the study of RF driven hydrogen plasma sources. The external antenna will be externally wrapped around plasma chamber. RF pulsed power feeding at 2 MHz frequency to antenna for plasma generation (ionisation) and heat up through inductive coupling. This antenna has been modeled and simulated with Opera-3D simulation platform using TOSCA module. This simulation will help to study the magnetic field behaviour and determination of electrical parameters of antenna. The analysis has been carried out by considering current of 400 Amp in antenna, the results are reported in the paper.

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2013 IEEE Applied Electromagnetics Conference (AEMC)

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