气溶胶沉积法制备透明金属-铁电纳米复合厚膜

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI:10.1109/ISAF.2007.4393421

Jaehyuk Park, J. Akedo

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引用次数: 1

摘要

采用气溶胶沉积法(ADM)制备了高透明金属-铁电纳米复合厚膜，并报道了其表面等离子体共振(SPR)性能的增强。ADM因其能够以高沉积速率和低工艺温度沉积复杂复合薄膜而备受关注。以亚微米级PZT颗粒和纳米级金颗粒(10-40 nm)为原料，以低于1 wt%的浓度制备复合金属介电粉末。纳米复合金/PZT薄膜在约640 nm处获得了增强的SPR。通过退火调节基体的介电常数，可以精确地控制纳米复合膜中SPR的位置。此外，我们首次成功地在室温下沉积了具有高透明红色的金/ α - al2o3纳米复合薄膜。

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Transparent Metal-Ferroelectric nanocomposite thick films prepared by Aerosol Deposition Method

We prepared high transparent metal-ferroelectric nanocomposite thick films by aerosol deposition method (ADM) and report their enhanced surface plasmon resonance (SPR) properties. ADM has been attracting much attention for its ability to deposit complex composite films at a high deposition rate and a low process temperature. Composite metal-dielectric powders are prepared from submicron particles of PZT and nano particles of gold (10-40 nm) with concentrations below 1 wt%. Nanocomposite gold/PZT 3-mum-thick film acquired enhanced SPR at approximately 640 nm as a result of annealing. The SPR position in nanocomposite films deposited by ADM can be precisely controlled by adjusting the dielectric constant of the host matrix by annealing.. Moreover, we succeeded in room-tenperature-deposition of gold/alpha-Al2O3 nanocomposite films with high transparent red color for the first time.

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2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

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