用于双轴光学扫描的小型压电驱动自适应棱镜

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/omn.2019.8925071

Florian Lemke, Pascal M Weber, U. Wallrabe, M. Wapler

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引用次数: 1

摘要

我们提出了一个双轴自适应棱镜，允许一个简化的光路相比，扫描镜。使用三个具有无级控制的压电双晶片致动器，我们主动倾斜流体-玻璃界面，实现扫描角度高达8.5°，响应时间低至5.5 ms。紧凑和优化的设计外径为33毫米，孔径为7毫米。

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Miniaturized piezo-actuated adaptive prism for biaxial optical scanning

We present a biaxial adaptive prism that allows for a simplified light path compared to scanning mirrors. Using three piezo bimorph actuators with stepless control, we actively tilt a fluid-glass interface, achieving scan angles up to 8.5° with response times down to 5.5 ms. The compact and optimized design has an outer diameter of 33 mm for a 7 mm aperture.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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