{"title":"带光扫描仪的粗光栅精密位移测量系统","authors":"Xiang-hui Yuan","doi":"10.1117/12.2294703","DOIUrl":null,"url":null,"abstract":"A coarse grating precision displacement measuring system is described in the paper. The system consists of an opto-scanner used as a displacement sensor, a simple optical system, a large pitch reflecting coarse grating (X=0.635mm) and signal processing circuits etc. After describing the opto-scanner briefly, the paper expounds the principle of the system, the schematic circuits and the theory of dynamic phase discriminating and subdivision. Experiment results is satisfactory.","PeriodicalId":322470,"journal":{"name":"Marketplace for Industrial Lasers","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Coarse grating precision displacement measuring system with opto-scanner\",\"authors\":\"Xiang-hui Yuan\",\"doi\":\"10.1117/12.2294703\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A coarse grating precision displacement measuring system is described in the paper. The system consists of an opto-scanner used as a displacement sensor, a simple optical system, a large pitch reflecting coarse grating (X=0.635mm) and signal processing circuits etc. After describing the opto-scanner briefly, the paper expounds the principle of the system, the schematic circuits and the theory of dynamic phase discriminating and subdivision. Experiment results is satisfactory.\",\"PeriodicalId\":322470,\"journal\":{\"name\":\"Marketplace for Industrial Lasers\",\"volume\":\"42 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Marketplace for Industrial Lasers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2294703\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Marketplace for Industrial Lasers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2294703","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Coarse grating precision displacement measuring system with opto-scanner
A coarse grating precision displacement measuring system is described in the paper. The system consists of an opto-scanner used as a displacement sensor, a simple optical system, a large pitch reflecting coarse grating (X=0.635mm) and signal processing circuits etc. After describing the opto-scanner briefly, the paper expounds the principle of the system, the schematic circuits and the theory of dynamic phase discriminating and subdivision. Experiment results is satisfactory.
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