一种以金属-绝缘体-金属点为介电层的免粘高品质因数MEMS可变电容器

2013 IEEE Radio Frequency Integrated Circuits Symposium (RFIC) Pub Date : 2013-06-02 DOI:10.1109/RFIC.2013.6569614

F. Nakazawa, T. Shimanouchi, T. Katsuki, O. Toyoda, S. Ueda

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引用次数: 1

摘要

本文介绍了一种具有高工作可靠性和高品质因数的微机电系统可变电容的新设计。提出了可变电容器中固定电极和活动电极之间的金属-绝缘体-金属(MIM)点。制造的MEMS电容器运行10亿次或更多次而不粘滞。实验结果表明，在0.5 pF下，MIM点具有200的高品质因数，可以有效地实现无粘滞和高品质因数的MEMS可变电容。

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A sticking-free and high-quality factor MEMS variable capacitor with metal-insulator-metal dots as dielectric layer

This paper describes a novel design of a MEMS variable capacitor with high operating reliability and high quality factor. Metal-Insulator-Metal (MIM) dots between a fixed electrode and a movable electrode in a variable capacitor is proposed. A Fabricated MEMS capacitor was operated one billion or more times without sticking. It demonstrated a high quality factor of 200 at 0.5 pF. It was experimentally confirmed that MIM dots effectively achieve a sticking-free and high-quality-factor MEMS variable capacitor.

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2013 IEEE Radio Frequency Integrated Circuits Symposium (RFIC)

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