交联聚乙烯酚作为柔性底栅底触点晶体管的介质

Marco R. Cavallari, J. E. E. Izquierdo, D. C. García, V. A. M. Nogueira, J. D. S. Oliveira, L. M. Pastrana, I. Kymissis, F. Fonseca
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引用次数: 5

摘要

聚乙烯醇与交联剂被证明是一个介电膜,并结合到一个底栅有机晶体管结构。薄膜对可见光透明,耐有机溶剂,并与等离子体蚀刻相容以打开过孔。然而,只有交联薄膜经受住了光刻,以便在电介质的顶部形成底部接触电极的图案。交联膜的介电常数约为5,高于聚甲基丙烯酸甲酯和氧化硅。该器件具有应用于有机晶体管柔性传感器阵列的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Cross-linked polyvinyl phenol as dielectric for flexible bottom gate bottom contact transistors
Polyvinyl phenol with a cross-linker agent was demonstrated as a dielectric film and incorporated to a bottom gate organic transistor structure. Films were shown transparent to visible light, resistant to organic solvents and compatible with plasma etching to open vias. Only cross-linked films, however, withstood lithography in order to pattern bottom contact electrodes on top of the dielectric. Cross-linked films showed a dielectric constant of ca. 5, which is higher than polymethylmethacrylate and silicon oxide. The devices herein have potential to be applied in flexible sensor arrays from organic transistors.
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