Fabrication of Perovskite Solar Cells with E-beam Evaporation TiO2Thin films: Considering Substrate Heater

The aim of this paper is to investigate the photovoltaic performance of perovskite solar cells (PeSCs) with E-beam evaporated TiO2 films prepared on fluorine doped tin oxide (FTO) substrate at room temperature (RT, 25°C) and 160°C substrate temperature conditions. The effect of substrate temperature on the structural, optical, and surface morphological properties of E-beam evaporation (EBE) of TiO2 films has been investigated in this work. The TiO2 films prepared with 160°C has high crystallinity with more open upper-surface than the TiO2 films at RT condition. The PeSC with TiO2 prepared at 160°C has the maximum power conversion efficiency of 7.60%, which is higher than PeSCs with TiO2 at RT. The photocurrent increases, the open-circuit voltage and fill factor decreases with the increase of substrate temperature.