新型微型FIA-ISFET集成传感器的研制

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings Pub Date : 1995-11-06 DOI:10.1109/TENCON.1995.496368

Niu Mengnian, Ding Xinfang, Tao Xiang, Lin Wei

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引用次数: 1

摘要

基于流动注射分析(FIA)的原理，本文报道了一种新型的微型FIA- isfet集成传感器。芯片上集成了4对长臂pH-ISFET/REFET单元和对称Ti/Au膜伪参比电极，实现了换能器和微通流池的集成配置。传感器的芯片尺寸为6*8mm/sup 2/。初步实验结果表明，在蠕动泵的驱动下，液体流动非常流畅，动态测量所需的测试样品量大大减少。集成后的传感器响应速度快，可靠性和稳定性大大提高。

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Development of a novel micro FIA-ISFET integrated sensor

Based on the principle of flow injection analysis (FIA), this paper reports a novel micro FIA-ISFET integrated sensor. Four pairs of long-arm pH-ISFET/REFET units and symmetric Ti/Au film pseudo-reference electrodes are integrated on the chip, so that an integrated configuration of transducer and micro flow-through cell is achieved. The chip size of the sensor is 6*8mm/sup 2/. Initial experimental results indicate that the liquid can be measured driven by peristaltic pump flows with great fluency and that the amount of test sample needed in dynamic measurement is greatly reduced. The integrated sensor has quick response and its reliability and stability are considerably improved.

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1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings

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