{"title":"微细电火花加工中尺寸公差与流体动力碎屑去除的参数化研究","authors":"M. T. Richardson, Y. Gianchandani, D. Skala","doi":"10.1109/MEMSYS.2006.1627799","DOIUrl":null,"url":null,"abstract":"This paper reports a detailed evaluation of batch mode micro-electro-discharge machining (μEDM) of 316L stainless steel. Lithographically fabricated copper tools with parallel line features of 5-50 μm width and 5-75 μm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As tool feature density increased, debris accumulation effects began to dominate, eventually destroying both tool and workpiece. A two-step hydrodynamic debris removal technique yielded significant improvements in surface and edge finish, machining time, and tool wear over past work using standard vertical dither flushing.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"A Parametric Study of Dimensional Tolerance and Hydrodynamic Debris Removal in Micro-Electro-Discharge Machining\",\"authors\":\"M. T. Richardson, Y. Gianchandani, D. Skala\",\"doi\":\"10.1109/MEMSYS.2006.1627799\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a detailed evaluation of batch mode micro-electro-discharge machining (μEDM) of 316L stainless steel. Lithographically fabricated copper tools with parallel line features of 5-50 μm width and 5-75 μm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As tool feature density increased, debris accumulation effects began to dominate, eventually destroying both tool and workpiece. A two-step hydrodynamic debris removal technique yielded significant improvements in surface and edge finish, machining time, and tool wear over past work using standard vertical dither flushing.\",\"PeriodicalId\":250831,\"journal\":{\"name\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2006.1627799\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th IEEE International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2006.1627799","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Parametric Study of Dimensional Tolerance and Hydrodynamic Debris Removal in Micro-Electro-Discharge Machining
This paper reports a detailed evaluation of batch mode micro-electro-discharge machining (μEDM) of 316L stainless steel. Lithographically fabricated copper tools with parallel line features of 5-50 μm width and 5-75 μm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As tool feature density increased, debris accumulation effects began to dominate, eventually destroying both tool and workpiece. A two-step hydrodynamic debris removal technique yielded significant improvements in surface and edge finish, machining time, and tool wear over past work using standard vertical dither flushing.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
