I. V. Makarov, A. V. Perelygina, N. S. Chapanov, V. Shokorov
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INVESTIGATION OF THE INFLUENCE OF CHEMICAL TREATMENT ON THE PROPERTIES OF SAMARIUM MONOSULFIDE IN THE PROCESS OF MANUFACTURING PRESSURE SENSOR CRYSTALS
con nitride, etching of SmS and the formation of metallization. Materials and methods. As research methods were used: analysis of scientific and technical literature to determine the method of forming the instrument layer as well as experiment in which the chemical composition of SmS formed on a silicon substrate was determined after exposure to chemical treatment. Results.In the course of the research, the optimal chemical reagents, the materials used and the ТЕХНОЛОГИЯ
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