叠栅结构BSI图像传感器光学性能研究

2015 IEEE International Electron Devices Meeting (IEDM) Pub Date : 2015-12-01 DOI:10.1109/IEDM.2015.7409801

Yun-Wei Cheng, T. Tsai, Chun-Hao Chou, Kuo-cheng Lee, Hsin-Chi Chen, Yung-Lung Hsu

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引用次数: 6

摘要

将堆叠网格结构应用于背面照明(BSI)图像传感器中，研究了不同尺寸和高度的网格设计对器件性能的影响。模拟的角响应表明，在大入射角下，量子效率(QE)下降较小，采用堆叠网格结构的器件的信噪比(SNR-10)提高了约10%。

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Optical performance study of BSI image sensor with stacked grid structure

Stacked grid structure is implemented into back-side illumination (BSI) image sensors and device performance for various grid design including dimension and height has been investigated. Simulated angular response shows less quantum efficiency (QE) degradation in large incident angle and SNR-10 has a ~10% improvement for devices with stacked grid structure.

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2015 IEEE International Electron Devices Meeting (IEDM)

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