High frequency micromechanical piezo-on-silicon block resonators

This paper reports on the design, implementation and characterization of high-frequency single crystal silicon (SCS) block resonators with piezoelectric electromechanical transducers. The resonators are fabricated on 4/spl mu/m thick SOI substrates and use sputtered ZnO as the piezo material. The centrally-supported blocks can operate in their first and higher order length extensional bulk modes with high quality factor (Q). The highest measured frequency is currently at 210 MHz with a Q of 4100 under vacuum, and the highest Q measured is 11,600 at 17 MHz. The uncompensated temperature coefficient of frequency (TCF) was measured to be -40ppm//spl deg/C and linear over the temperature range of 20-100/spl deg/C.