金属阳极碳纳米管横向场发射体

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-01 DOI:10.1109/IVNC.2006.335248

Y. Wong, W. Kang, J. Davidson, B. Choi, J.H. Huang

{"title":"金属阳极碳纳米管横向场发射体","authors":"Y. Wong, W. Kang, J. Davidson, B. Choi, J.H. Huang","doi":"10.1109/IVNC.2006.335248","DOIUrl":null,"url":null,"abstract":"A lateral carbon nanotube (CNT) field emission device with a metallic anode is fabricated through a dual-mask microfabrication process complemented with a two-step microwave plasma-enhanced chemical vapor deposition. SEM was employed to characterize the structure of the fabricated device","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"139 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Carbon Nanotube Lateral Field Emitters with Metallic Anode\",\"authors\":\"Y. Wong, W. Kang, J. Davidson, B. Choi, J.H. Huang\",\"doi\":\"10.1109/IVNC.2006.335248\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A lateral carbon nanotube (CNT) field emission device with a metallic anode is fabricated through a dual-mask microfabrication process complemented with a two-step microwave plasma-enhanced chemical vapor deposition. SEM was employed to characterize the structure of the fabricated device\",\"PeriodicalId\":108834,\"journal\":{\"name\":\"2006 19th International Vacuum Nanoelectronics Conference\",\"volume\":\"139 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 19th International Vacuum Nanoelectronics Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVNC.2006.335248\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 19th International Vacuum Nanoelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC.2006.335248","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

采用双掩膜微加工工艺和两步微波等离子体增强化学气相沉积工艺制备了一种金属阳极的横向碳纳米管场发射器件。利用扫描电镜对制备的器件进行了结构表征

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Carbon Nanotube Lateral Field Emitters with Metallic Anode

A lateral carbon nanotube (CNT) field emission device with a metallic anode is fabricated through a dual-mask microfabrication process complemented with a two-step microwave plasma-enhanced chemical vapor deposition. SEM was employed to characterize the structure of the fabricated device

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2006 19th International Vacuum Nanoelectronics Conference

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