T. Hoshino, S. Aoki, Masahide Itoh, M. Shichiri, Hiroshi Itoh
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Scatterometry of isolated resist pattern by soft X-rays using deep-learning analysis
When the scattering or absorption is large, the 3D resolution is about 100 wavelengths in holography, but the combination of scatterometry, imaging, and deep learning is a general-purpose method with a resolution of about wavelength.
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