用于高通量单色仪的氮化Ru/B4C多层膜的热稳定性和时间稳定性

Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI:10.1364/OIC.2019.FB.2

Yang Liu, Qiushi Huang, Hui Jiang, R. Qi, Yufei Feng, Guangzhi Yin, Xingmin Zhang, Zhong Zhang, Zhanshan Wang

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引用次数: 1

摘要

制备了用于硬x射线单色仪的氮化Ru/B4C多层膜，并对其进行了退火，分析了其热稳定性。结果表明，氮化多层膜在300℃高温下保持稳定，2年无结构变化。

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Thermal and temporal stability of nitridated Ru/B4C multilayer for high flux monochromator application

Nitridated Ru/B4C multilayers for hard X-ray monochromator were fabricated and annealed to analyze the thermal stability. The results show that the nitridated multilayer remains stable up to 300 °C and no structure changes were observed in 2 years.

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Optical Interference Coatings Conference (OIC) 2019

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