金刚石薄膜的场发射特性

R. Z. Bakhtizin, Yu.M. Yamaguzing, S. Pshenichnyuk
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引用次数: 0

摘要

仅给出摘要形式,如下。涂有金刚石薄膜的硅尖在场发射阴极中表现出相当大的前景,因为这些薄膜具有空气稳定的负电子亲和表面。这种表面可以在低电场条件下在低真空条件下进行场发射。本文提出了一种制备低杂质高质量金刚石薄膜的新方法。该技术基于低能C/sup +/离子的沉积。这些离子在双等离子体中产生,并通过光束形成系统和维恩滤光器的质量分离引导到硅尖。利用探针空穴I-V特性测量和场发射电子能谱法研究了吸附在硅表面的金刚石的电子特性。本文报告了上述研究的最新发现,并提出了一个相关的模型来解释场发射电子能谱的显著变化。最后,我们讨论了这种系统中电子传递的可能机制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field emission properties of diamond thin films
Summary form only given, as follows. Si tips coated with thin diamond films show considerable promise for use in field emission cathodes because these films demonstrate an air-stable negative electron affinity surface. Such a surface may allow for fields emission at low electric field under poor vacuum conditions. In this work, a new technique for preparation of high quality diamond films with low impurity contamination has been developed. This technique is based on deposition of low energy C/sup +/ ions. These ions have been generated in duoplasmatron and directed to the Si tip via the beam forming system and mass-separation with Wien's filter. A study aimed an understanding the electronic properties of diamond adsorbed on the Si surface has been carried out by means of probe-hole I-V characteristics measurements and field emission electron spectroscopy as well. The paper reports on recent findings to emerge from the above study, and presents a pertinent model to explain the significant changes in energy spectra of field emitted electrons. Finally, we discuss the possible mechanism of electron transport in such a system.
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