一种用于地面和天基电光系统的高精度光学元件成形工艺

V. Gorshkov, Alexey S. Savelyev, A. S. Nevrov, A. V. Smirnova
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引用次数: 0

摘要

综述了用于科学研究和地球遥感的天基电光系统高精度光学元件的先进制造工艺。提出了电光系统光学元件非球面(包括离轴曲面)自动成形的集成工艺。本文讨论了几乎任意非球面度的光学零件的各种成形方法和各种离轴参数(离轴非球面)的值,通过标准偏差准则使表面形状精度达到λ/60 ~ λ/80 (λ = 0.6328微米)。本文还介绍了新开发的离轴准直器,设计用于在从紫外到红外辐射的宽光谱范围内形成参考波前。特别是一种具有自适应离轴反射镜的镜面准直器,它能够改变正在形成的波前,从而获得所研究的电光系统的响应函数。使用TESAF工艺构建的光学系统已经成功使用。关键词:曲面整形,非球面,干涉图,标准差。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A process for shaping high-precision optical components for ground- and space-based electrooptic systems
The paper reviews advanced process for manufacturing high-precision optical components used in space-based electrooptic systems for scientific research and Earth remote sensing. It presents an integrated process for automatic shaping (TESAF) of aspheric surfaces, including off-axis surfaces, of optical elements for electrooptic systems. This paper discusses various methods for shaping optical parts with virtually any degree of asphericity and various values of the off-axis parameter (off-axis aspherics) achieving surface shape precision to within λ/60…λ/80 (λ = 0.6328 micron) by the standard deviation criteria. The paper also presents the newly developed off-axis collimators, designed to shape a reference wavefront within a broad spectral range from ultraviolet to infrared radiation. In particular, a mirror collimator with an adaptive off-axis mirror that is capable of changing the wavefront that is being formed in order to obtain the response function of the electrooptical system under study. Optical systems built using the TESAF process are already successfully used. Key words: surface shaping, aspheric surface, surface interferogram, standard deviation.
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