Electrostatic MEMS micromirror servo control for micro laser communication terminal

CubeSats are gaining popularity in low-Earth orbit networks due to their low cost, fast response, and the potential and ability to form constellations. But establishing optical communication links between CubeSats is a daunting task. Laser transmission links require very strict beam pointing stability, and for small satellites with strict size, weight, and power (SWaP) requirements, it is imperative to research light and miniaturized laser communication terminals. Electrostatic micro-electromechanical systems (MEMS) mirrors are currently the most effective devices for realizing SWaP terminals in the field of optical communication. Therefore, this paper mainly studies the servo control of electrostatic MEMS mirrors for micro-miniature laser communication terminals. By using the position error feedback of the photodetector, the servo control requirements of high response speed and high robustness are realized.