{"title":"300mm晶圆生产线模型","authors":"P. Campbell, D. Rohan, E. MacNair","doi":"10.1145/324138.324554","DOIUrl":null,"url":null,"abstract":"Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300mm wafer fabrication line that we are using to make strategic decisions related to the factory.","PeriodicalId":287132,"journal":{"name":"Online World Conference on Soft Computing in Industrial Applications","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"A model of a 300mm wafer fabrication line\",\"authors\":\"P. Campbell, D. Rohan, E. MacNair\",\"doi\":\"10.1145/324138.324554\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300mm wafer fabrication line that we are using to make strategic decisions related to the factory.\",\"PeriodicalId\":287132,\"journal\":{\"name\":\"Online World Conference on Soft Computing in Industrial Applications\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Online World Conference on Soft Computing in Industrial Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1145/324138.324554\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Online World Conference on Soft Computing in Industrial Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1145/324138.324554","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300mm wafer fabrication line that we are using to make strategic decisions related to the factory.
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