{"title":"测量速度快的白光干涉法","authors":"Pavel Pavlíček, V. Svak","doi":"10.1117/12.2084973","DOIUrl":null,"url":null,"abstract":"White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.","PeriodicalId":434989,"journal":{"name":"Wave and Quantum Aspects of Contemporary Optics","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"White-light interferometry with high measurement speed\",\"authors\":\"Pavel Pavlíček, V. Svak\",\"doi\":\"10.1117/12.2084973\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.\",\"PeriodicalId\":434989,\"journal\":{\"name\":\"Wave and Quantum Aspects of Contemporary Optics\",\"volume\":\"63 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Wave and Quantum Aspects of Contemporary Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2084973\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Wave and Quantum Aspects of Contemporary Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2084973","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
White-light interferometry with high measurement speed
White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.
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