三束激光干涉图样中二维相移的测定

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI:10.1109/3M-NANO.2012.6473001

Y. Lei, Zuobin Wang, Jia Xu, Jinjin Zhang, Dapeng Wang, Yu Hou, Y. Yue, Dayou Li

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引用次数: 2

摘要

本文介绍了一种测定二维相移的方法。该方法将二维相移分为水平分量和垂直分量，通过模式相关、勾股定理和亚像素精度的线性插值确定相移的各个分量。计算机仿真和实验表明，该方法可用于确定两束干涉图之间的相位差。该方法也可用于确定其他多波束干涉图中的相移。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Determination of two-dimensional phase shifts in three-beam laser interference patterns

This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.

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来源期刊

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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