{"title":"低反射分束器在HDC和高能量模式下的ArF激光热点监测","authors":"Masoud Babaeian, E. Mason, Jue Wang, G. Cox","doi":"10.1117/12.2641982","DOIUrl":null,"url":null,"abstract":"We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.","PeriodicalId":202227,"journal":{"name":"Laser Damage","volume":"134 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter\",\"authors\":\"Masoud Babaeian, E. Mason, Jue Wang, G. Cox\",\"doi\":\"10.1117/12.2641982\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.\",\"PeriodicalId\":202227,\"journal\":{\"name\":\"Laser Damage\",\"volume\":\"134 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-12-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser Damage\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2641982\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Damage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2641982","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter
We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.
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