{"title":"基板倾斜对激光干涉光刻图案的影响","authors":"Xiao-xia Zhao, Hongying Wang, Yongjun Xie, W. Fan","doi":"10.1109/SOPO.2010.5504313","DOIUrl":null,"url":null,"abstract":"The effect of the tilted substrate on the lithography patterns in maskless Laser Interference Lithography (MLIL) was numerically and experimentally studied. The experiments showed that the period of interference patterns becomes larger with increasing tilt angles of the substrate, as is in good agreement with theoretical analysis. It was also shown that there is no evident change when the rotational angle was less than 3 degree in our experiment. The significance of our analytical results for MLIL and the fabrication of integrated circuit was discussed.","PeriodicalId":155352,"journal":{"name":"2010 Symposium on Photonics and Optoelectronics","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Effect of the Laser Interference Lithography Patterns When Substrate Tilted\",\"authors\":\"Xiao-xia Zhao, Hongying Wang, Yongjun Xie, W. Fan\",\"doi\":\"10.1109/SOPO.2010.5504313\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The effect of the tilted substrate on the lithography patterns in maskless Laser Interference Lithography (MLIL) was numerically and experimentally studied. The experiments showed that the period of interference patterns becomes larger with increasing tilt angles of the substrate, as is in good agreement with theoretical analysis. It was also shown that there is no evident change when the rotational angle was less than 3 degree in our experiment. The significance of our analytical results for MLIL and the fabrication of integrated circuit was discussed.\",\"PeriodicalId\":155352,\"journal\":{\"name\":\"2010 Symposium on Photonics and Optoelectronics\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-06-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 Symposium on Photonics and Optoelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOPO.2010.5504313\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 Symposium on Photonics and Optoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOPO.2010.5504313","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The Effect of the Laser Interference Lithography Patterns When Substrate Tilted
The effect of the tilted substrate on the lithography patterns in maskless Laser Interference Lithography (MLIL) was numerically and experimentally studied. The experiments showed that the period of interference patterns becomes larger with increasing tilt angles of the substrate, as is in good agreement with theoretical analysis. It was also shown that there is no evident change when the rotational angle was less than 3 degree in our experiment. The significance of our analytical results for MLIL and the fabrication of integrated circuit was discussed.
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