一门利用微机械装置的工艺设计课程

Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium Pub Date : 1991-06-12 DOI:10.1109/UGIM.1991.148122

M. Lu, M. Schmidt

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引用次数: 1

摘要

描述麻省理工学院正在开发的一门课程，旨在将实验微加工工艺设计纳入本科水平。他们讨论了这门课程的理念和组织，并解释了如何使用微机械结构作为测试工具来实现它。特别是，一个由四名学生组成的团队在一个学期内成功制造了一个硅压力传感器，并进行了测试和演示，以测量0-5 psi范围内的压力。

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A process design course utilizing micromechanical devices

Describes a course which is being developed at MIT aimed at incorporation of experimental microfabrication process design at the undergraduate level. They discuss the philosophy and organization of this course and explain how it has been implemented using micromechanical structures as the test vehicle. In particular, a silicon pressure sensor was successfully fabricated by a team of four students in one semester, and was tested and demonstrated to measure pressures in the range of 0-5 psi.<>

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Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium

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