脉冲激光沉积法在MgO衬底上制备NaNbO3铁电薄膜

S. Oda, T. Saito, T. Wada, H. Adachi
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引用次数: 1

摘要

利用K-Ta-O (KTO)缓冲层,利用脉冲激光沉积技术在MgO衬底上成功制备了高质量的NaNbO3薄膜。在KTO/(100)MgO衬底上沉积SrRuO3 (SRO)下电极层,再沉积NaNbO3薄膜。x射线衍射结果表明,纳米bo3薄膜在(100)SRO/KTO/(100)MgO衬底上外延生长。纳米bo3薄膜的P-E磁滞回线具有铁电特性。讨论了晶体学和介电性能,并与在(100)SrTiO3衬底上外延生长的NaNbO3薄膜进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Preparation of Ferroelectric NaNbO3 Thin Films on MgO Substrate by Pulsed Laser Deposition
We have successfully fabricated good quality NaNbO3 films on MgO substrate by pulsed laser deposition by using K-Ta-O (KTO) buffer layer. SrRuO3 (SRO) lower electrode layer was deposited on KTO/(100)MgO substrate and then the NaNbO3 film was deposited. X-ray diffraction showed that the NaNbO3 film was epitaxially grown on a (100)SRO/KTO/(100)MgO substrate. The P-E hysteresis loop of the NaNbO3 film was characteristic of ferroelectric behavior. The crystallographic and dielectric properties are discussed with a comparison of those of the NaNbO3 films epitaxially grown on (100)SrTiO3 substrate.
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