基于MEMS的惠斯通电桥型电阻式智能传感器的低偏置、低噪声、可变增益接口电路及其灵敏度和偏置补偿新方案

Anupam Dutta, T. K. Bhattacharyya
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引用次数: 5

摘要

设计了一种全模拟、片上、低输入偏置、低噪声、可变增益的仪表放大器,该放大器具有传感器灵敏度和偏置的非线性和动态温度补偿的新方案。m商用CMOS工艺。该系统的可扩展系统带宽高达5kHz,动态范围为84dB,最大增益为104dB。所有的传感器非理想性和CMOS工艺失配都被纳入到仿真中。利用该接口电路,设计了智能MEMS压阻式加速度计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low Offset, Low Noise, Variable Gain Interfacing Circuit with a Novel Scheme for Sensor Sensitivity and Offset Compensation for MEMS Based, Wheatstone Bridge Type, Resistive Smart Sensor
A fully-analog, on-chip, low input offset, low noise, variable gain instrumentation amplifier with a new scheme for nonlinear and dynamic temperature compensation of sensor sensitivity and offset, is designed in 0.18?m commercial CMOS process. The system has a scalable system bandwidth up to 5kHz, a dynamic range of 84dB, and a maximum gain of 104dB. All the sensor non idealities and CMOS process mismatch have been incorporated in simulation. Using this interfacing circuit, a smart MEMS piezoresistive accelerometer has been designed subsequently.
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