利用原子层沉积技术提高紫外光学涂层的性能和稳定性

{"title":"利用原子层沉积技术提高紫外光学涂层的性能和稳定性","authors":"J. Hennessy, S. Nikzad, A. Jewell","doi":"10.1117/12.2563250","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":170593,"journal":{"name":"Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improving the performance and stability of ultraviolet optical coatings using atomic layer deposition\",\"authors\":\"J. Hennessy, S. Nikzad, A. Jewell\",\"doi\":\"10.1117/12.2563250\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":170593,\"journal\":{\"name\":\"Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray\",\"volume\":\"79 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-12-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2563250\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2563250","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}