部分覆盖铁磁薄膜的振动MEMS磁强计的建模

2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI:10.1109/ISISS.2018.8358130

T. Perrier, R. Lévy, P. Kayser, B. Verlhac, J. Moulin

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引用次数: 0

摘要

本文建立了部分覆盖铁磁薄膜的振动磁强计灵敏度的全解析模型。该模型基于瑞利能量法，并通过有限元法和实验测量得到了验证。因此，可以优化铁磁薄膜的位置，并在灵敏度的提高和谐振器能量损失的减少之间找到最佳的权衡，以获得更好的分辨率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film

This paper describes a fully analytic model of sensitivity of a vibrating magnetometer partially covered with a ferromagnetic thin film. This model is based on the Rayleigh's energetic method and is confirmed by Finite Element Method (FEM) and experimental measurements. Thereby, it is possible to optimize the position of the ferromagnetic thin film and find the best tradeoff between the sensitivity increase and the reduction of resonator energy losses to achieve better resolution.

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2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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