各向异性薄膜偏振干涉涂层

F. Flory, C. Defay
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引用次数: 0

摘要

现在众所周知,薄膜形式的材料的微观结构可能与相应的块状材料略有不同。使用加热坩埚或电子束枪的传统蒸发通常会导致柱中的腔隙结构。这种微观结构对薄膜光学性能的影响是众所周知的。折射率略小于块状材料的折射率;水在孔隙中的吸附-解吸导致涂层光谱反射和透射的变化。但除了这些缺点之外,柱状结构也有其优点,因为它也会引起折射率的各向异性。当用离子束辅助沉积时,材料的微观结构被改变,其各向异性也被改变。然后可以通过离子能量来控制各向异性,从而可以构建各向同性膜和各向异性膜相结合的多层滤波器。这为制造作用于光的偏振态的元件开辟了道路。给出了不同构件的计算结果。平面非吸收单色偏振器或偏振旋转器可以用这种方法制成。控制沉积的困难在于各向异性层必须沉积在非旋转基底上。讨论了这一问题,并给出了多层滤光片光学特性的测量实例。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Polarizing interference coatings made with anisotropic thin films
It is now well known that the microstructure of materials in thin film form can be slightly different from that of corresponding bulk materials. Conventional evaporation using a heated crucible or an electron beam gun generally leads to a lacunar structure in columns. Some consequences of this microstructure on the optical properties of the films are well-known. The refractive indices are slightly smaller than that of the bulk material; water adsorption-desorption in the voids leads to variations of the spectral reflection and transmission of the coatings. But apart from these disadvantages, the columnar structure can present advantages because it also induces anisotropy of refractive index. When deposited with an ion beam assistance the microstructure of the material is modify and so is its anisotropy. The anisotropy can then be controlled through the ion energy, making it possible to construct multilayer filters combining both isotropic films and anisotropic films. This opens the way for the making of components acting on the polarization state of light. Results of calculation for different components are presented. Planar non absorbing monochromatic polarizers or polarization rotators can be made in this way. The difficulty in controlling the deposition comes from the fact that the anisotropic layers must be deposited on non rotating substrates. This problem is discussed and examples of measured optical properties of multilayer filters will be given.
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