简化了16%效率多晶硅太阳能电池的量产工艺

Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036) Pub Date : 2000-09-15 DOI:10.1109/PVSC.2000.915786

S. Arimoto, M. Nakatani, Y. Nishimoto, H. Morikawa, M. Hayashi, H. Namizaki, K. Namba

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引用次数: 15

摘要

我们已经开发了一种简化的大规模生产过程，可生产效率为16%的多晶硅太阳能电池。本文介绍了新开发的不增加工艺步骤和不使用昂贵设备的制备工艺。主要改进点有:(1)采用Na2CO/ sub3 /的新型织构方法，与传统的NaOH+IPA蚀刻相比，降低了制作成本;(2) sinarc的PECVD温度优化;(3)用于PECVD-SiN AR膜透火的改进银浆:减少了在烧成过程中对扩散n层的渗透，以及高纵横比的细线电极。通过结合这些新技术，四家不同供应商的mc-Si晶圆获得了15 cm/spl次/15 cm电池的16%效率。

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Simplified mass-production process for 16% efficiency multi-crystalline Si solar cells

We have developed a simplified mass-production process for 16% efficiency multi-crystalline silicon solar cells. In this paper, newly developed fabrication process without increasing process steps and applying expensive equipment is described. The main improved points are as follows: (1) novel texturing method using Na2CO/sub 3/: reduced fabrication cost compared to conventional NaOH+IPA etching; (2) optimization of PECVD temperature for SiN ARC; and (3) improved silver paste for fire-through of PECVD-SiN AR film: reduction of penetration into diffused n-layer during firing and finer line electrodes with high aspect ratio. By combining such novel technologies, 16% efficiency for 15 cm/spl times/15 cm cells has been obtained for four different suppliers mc-Si wafers.

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Conference Record of the Twenty-Eighth IEEE Photovoltaic Specialists Conference - 2000 (Cat. No.00CH37036)

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