非冷却微辐射热计阵列

A. Oleynik, R. Salikhov
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引用次数: 0

摘要

本文为研制高质量的固体非冷却微辐射热计阵列红外辐射探测器提供了必要的理论和实践依据。基于MEMS技术的微测热计阵列的发展现状与展望。介绍了利用MEMS技术研制的微测热计阵列。国外生产的比较特性阵列接收机。本文介绍了一种基于VOx薄膜的新型高速多元件热传感器在激光辐射能量参数监测中的应用。该开发是在接收接收现场的热探测器的马赛克布置过程中进行的。在VOx薄膜的基础上,热敏层的厚度为60 nm,作为介质衬底,云母ST-1厚度为40微米。当使用最小数量的测量通道获得可接受的激光图像时。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Uncooled microbolometer arrays
The basic theoretical and practical provisions necessary for the development of high-quality solid-state uncooled microbolometer arrays detectors of infrared radiation in this article. The state and prospects of development of microbolometer arrays on MEMS technology. The information about the microbolometer arrays developed by MEMS technology. The comparative characteristic arrays receivers of foreign production. The paper shows the application of a new type of high-speed multi-element thermal sensors based on VOx films with internal memory mode to monitor energy parameters of laser radiation. This development is in the process of the mosaic arrangement of heat detector on the receiving receiver site. The thickness of the heat-sensitive layer on the basis of VOx film was 60 nm as an dielectric substrate, a mica ST-1 40 micron thick. When using the minimum number of measurement channels get an acceptable picture of the laser image.
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