伞式电池:用于SOC应用的逻辑过程兼容的2T电池

2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408) Pub Date : 2003-06-12 DOI:10.1109/VLSIC.2003.1221170

S. Akiyama, N. Oodaira, T. Ishikawa, D. Hisamoto, T. Watanabe

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引用次数: 1

摘要

我们提出雨伞单元，一个逻辑-过程兼容的2T-DRAM单元SOC应用。该电池具有两个逻辑晶体管和一个平面MIM电容器，放置在晶体管上方的铜线上，形成伞状结构。这需要一个额外的照片掩模。其面积为26f /sup /，比6T电池小约60%。仔细的偏置设计和亚iv传感方案解决了电池固有的耦合问题，并允许使用薄氧化物逻辑晶体管以及在0.72 V的位线电压下工作。

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The Umbrella Cell: a logic-process-compatible 2T cell for SOC applications

We propose the Umbrella Cell, a logic-process-compatible 2T-DRAM cell for SOC applications. The cell has two logic transistors and a planar MIM capacitor placed on a Cu wire above the transistors to form an umbrella-like structure. This requires one additional photo mask. Its area is 26 F/sup 2/, approximately 60% smaller than a 6T cell. Careful bias design and a sub-IV sensing scheme solve the coupling problems inherent to the cell and allow the use of thin-oxide logic transistors as well as operation at a bit-line voltage of 0.72 V.

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2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408)

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