自组织In(Ga)As/GaAs量子点激光器的高功率连续波工作

Z.G. Wang, J.B. Liang, Gong Qian, B. Xu
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摘要

量子点(QD)激光器由于三维量子约束产生的类似delta函数的态密度,有望具有优于传统量子阱激光器的性能。要实现量子点激光器,必须显著改善无缺陷量子点的均匀性,并增加量子点密度。本文首先简要介绍了量子点的制备技术,重点介绍了应变诱导的自组织量子点生长技术。其次,本文介绍了利用MBE和Stranski-Krastanow (SK)生长模式在不同取向的GaAs和InP衬底上生长的自组织In(Ga)As/GaAs、InAlAs/GaAlAs和InAs/InAlAs量子点。在优化生长温度、V/III比、InAs用量、In/sub x/Ga/sub 1-x/ as、In/sub x/Al/sub 1-x/ as覆盖范围、成分x等生长条件下,控制应变层厚度,如略大于临界厚度,选择衬底取向或图案衬底,ODs的片密度可达10/sup 11/ cm/sup -2/ cm。网点大小分布控制在10%以内。这些对于获得低阈值电流密度(J/sub /)是非常重要的。本文还详细介绍了如何提高量子点的横向有序度和垂直对准度以实现量子点的基态激光,从而进一步降低量子点激光器的J/sub /。第三,在优化QD激光器的手工工程设计和QD的结构几何和生长条件的基础上,展示了GaAs矩阵中单个复合片或垂直耦合的In(Ga)As量子点和由19个QD激光二极管组成的大于10 W的半导体激光模块的1w连续波激光工作。发射波长约960 nm,连续波为0.614 W的QD激光器在室温下工作的寿命超过3000小时,此时输出功率仅降低到0.83 db。这是目前我们所知道的最好的结果。最后对QD激光器的发展趋势和前景进行了展望。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High power continuous-wave operation of self-organized In(Ga)As/GaAs quantum dot lasers
Quantum dot (QD) lasers are expected to have superior properties over conventional quantum well lasers due to a delta-function like density of states resulting from three dimensional quantum confinements. QD lasers can only be realized with significant improvements in uniformity of QDs free of defects and increasing QD density. In this paper, we first briefly give a review on the techniques for preparing QDs, and emphasis on strain induced self-organized quantum dot growth. Secondly, self-organized In(Ga)As/GaAs, InAlAs/GaAlAs and InAs/InAlAs QDs grown on both GaAs and InP substrates with different orientations by using MBE and the Stranski-Krastanow (SK) growth mode at our labs are presented. Under optimization of the growth conditions such as growth temperature, V/III ratio, the amount of InAs, In/sub x/Ga/sub 1-x/As, In/sub x/Al/sub 1-x/As coverage, the composition x, etc., controlling the thickness of the strained layers, for example, just slightly larger than the critical thickness and choosing the substrate orientation or patterned substrates as well, the sheet density of ODs can reach as high as 10/sup 11/ cm/sup -2/, and the dot size distribution is controlled to be less than 10%. These are very important to obtain a low threshold current density (J/sub th/) of the QD laser. How to improve the dot lateral ordering and the dot vertical alignment for realizing lasing from the ground states of the QDs and further reducing the J/sub th/ Of the QD lasers are also described in detail. Thirdly, based on the optimization of the hand engineering design for the QD laser and the structure geometry and growth conditions of QDs, 1 W continuous-wave (cw) laser operation of a single composite sheet or vertically coupled In(Ga)As quantum dots in a GaAs matrix and a larger than 10 W semiconductor laser module consisting of nineteen QD laser diodes is demonstrated. The lifetime of the QD laser with an emitting wavelength around 960 nm and 0.614 W cw operation at room temperature is over than 3000 hrs, at this point the output power was only reduced to 0.83 db. This is the best result as we know at the moment. Finally the future trends and perspectives of the QD laser are also discussed.
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