MEMS毫米波移相器的研究

Proceedings RAWCON 2002. 2002 IEEE Radio and Wireless Conference (Cat. No.02EX573) Pub Date : 2002-11-07 DOI:10.1109/RAWCON.2002.1030170

F. Guo, Z. Lai, S.Z. Zhu, Z.Q. Zhu, R. Zhu, Y. Zheng, G. Yang, A.Z. Li

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引用次数: 3

摘要

介绍了几种MEMS毫米波移相器的设计。它们由共面波导(CPW)传输线组成，周期性加载8/spl sim/32金属桥，作为电容开关。每一个开关元件都由一个由外加偏压驱动的薄金属膜组成。观察到显著的移相性能。一个MEMS移相器在20v偏置下达到372/spl度//3.5 mm，插入损耗(S/sub 21/)约为4/spl sim/7 dB。

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The study of MEMS millimeter wave phase shifter

Several designs of MEMS millimeter-wave phase shifters are presented. They consist of a coplanar waveguide (CPW) transmission line periodically loaded with 8/spl sim/32 metal bridges, functioning as capacitive switches. Every switching element consists of a thin metallic membrane actuated by applied bias. Remarkable phase shifter performances were observed. One MEMS phase shifter reached to 372/spl deg//3.5 mm under 20 V bias at 35 GHz, with an insertion loss (S/sub 21/) of about 4/spl sim/7 dB.

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Proceedings RAWCON 2002. 2002 IEEE Radio and Wireless Conference (Cat. No.02EX573)

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